基于压电陶瓷器件的微动系统智能控制研究  

Study on Intelligent Control of Micro-Positioning Stage Based on Piezoelectric Devices

作　　者：杨川[1] 赵强[1] 张志[1] 

机构地区：[1]西安交通大学机械制造系统工程国家重点实验室,陕西西安710049

出　　处：《压电与声光》2010年第1期55-58,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(50575178)

摘　　要：研究了微型三坐标测量仪中由压电陶瓷器件+柔性铰链构成的微动系统。根据该微动系统对定位精度的要求及微动系统具有迟滞、蠕变等强非线性的特点,该文提出一种神经网络自适应模糊推理比例微分积分(PID)位置控制系统,并进行了控制系统结构研究和实验分析。跟踪实验结果表明,智能PID控制能有效改善系统的动态和静态性能;定位精度实验表明两轴双向定位精度较传统PID控制有大的提高,达到了设计要求。The flexure-based micro-positioning stage of the micro-coordinate measuring machine is the object of our study. According to the positioning accuracy demands of the micrty-positioning system and the strong nonlinearity of the piezoelectric actuator such as hysteresis and creep, a PID position controlling system based on adaptive neural-fuzzy inference is proposed in this paper. The structure of the control system and the experimental analysis are also conducted. The results of tracking experiment show that the static and dynamic performance of intelligent control has been effectively improved. The results of positioning accuracy experiment show that the two-direction positioning accuracy of intelligent control is also improved, which can meet the design requirement.

关 键 词：压电陶瓷器件 模糊逻辑 神经网络 非线性 

分 类 号：TN104.2[电子电信—物理电子学] TH744.3[机械工程—光学工程]