MEMS毫米波滤波器的设计与制作  

Design and Fabrication of MEMS Millimeter-Wave Filters

作　　者：李倩[1] 杨志[1] 胡小东[1] 

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051

出　　处：《微纳电子技术》2010年第3期170-173,178,共5页Micronanoelectronic Technology

基　　金：国家部委资助项目

摘　　要：开展了一种基于MEMS工艺的毫米波带通滤波器结构设计和工艺实现,该滤波器结构采用高阻硅作为衬底材料的薄膜支撑结构,选用平行耦合滤波器形式,使用HFSS分析软件对该结构进行了模拟仿真。设计了中心频率为35.0GHz、带内损耗为2.2dB、30dB抑制带宽为2.2GHz的MEMS毫米波滤波器。给出了一套能降低毫米波损耗的MEMS毫米波带通滤波器工艺流程方案,并针对该工艺流程方案进行了关键参数的工艺误差仿真,实现了MEMS毫米波滤波器的工艺制作和测试。测试结果表明,获得的毫米波滤波器的测试结果与仿真结果比较接近。A millimeter-wave 6and-pass filter was designed and fabricated based on MEMS process. A high-resistance-silicon was used as the thin film support structure of substrates inside the filter. A parallel-coupled bandpass filter was selected, and the structure was simulated by HFSS software. A MEMS millimeter-wave filter was designed with a center frequency of 35 GHz, an in-band loss of 2.2 dB, and a 30 dB rejection bandwidth of 2. 2 GHz. A process scheme of the MEMS millimeter-wave band-pass filter was presented to reduce the millimeterwave loss. The error simulation of the key parameters was analyzed, and the fabrication and measurement of the MEMS millimeter-wave filter were realized. The measurement results are in good accordance with the simulation results.

关 键 词：微电子机械系统 毫米波 滤波器 微机械加工 微屏蔽线 

分 类 号：TH703[机械工程—仪器科学与技术]