用反射椭圆偏振光谱获得波长调制反射谱  

WAVELENGTH MODULATED REFLECTION SPECTRA OBTAINED BY REFLECTIVE ELLIPSOMETRIC SPECTROSCOPY

作　　者：张淑芝[1] 连洁[1] 张燕峰[1] 

机构地区：[1]山东大学光电系

出　　处：《物理》1998年第11期690-694,共5页Physics

摘　　要：文章分析了波长调制反射谱的实质是静态介电函数对能量的一级微商谱．将ＭＯＣＶＤ方法生长的ＧａＩｎＰ以及掺Ｓｉ两个样品，用椭偏光谱法测量得到可见光区的介电函数谱，并求其一级微商谱．将用于分析电反射谱的三点法推广用来分析介电函数的一级微商谱，得到波长调制反射谱的实验结果，并与介电函数谱的结果加以比较，使灵敏度和分辨率有很大提高．We point out that the wavelength modulated reflection spectrum is essentially the first derivative of the dielectric functions with respect to the energy. The dielectric function spectra for GaInP and doped Si samples grown by MOCVD were obtained in the region of visible light by using ellipsometric spectroscopy, and the first derivative spectra then evaluated. Extending the three- point-scaling used in the analysis of electric reflection spectra, the first derivative spectra of the dielectric functions can be analyzed. The experimental results of wavelength modulated reflective spectra were compared with these of dielectric function spectra.The sensitivity and resolution ratio increase remarkably.

关 键 词：椭圆偏振光谱 介电函数 波长调制谱 半导体 

分 类 号：O472.3[理学—半导体物理]