硒化锌基底2～16μm超宽带硬质红外增透膜的研制  

UltraBroad Band and Hard Infrared Antiflection Coatings on ZnSe for 2～16μm

作　　者：潘永强[1] 杭凌侠[1] 梁海锋[1] 田刚[1] 

机构地区：[1]西安工业大学陕西省薄膜技术与光学检测重点实验室,陕西西安710032

出　　处：《光学学报》2010年第4期1201-1204,共4页Acta Optica Sinica

基　　金：国家自然科学基金(60878032)资助课题

摘　　要：硒化锌材料具有较宽的透光区,使其在红外区有着广泛的应用,然而其作为基底,镀制超宽带增透膜却有相当大的难度,尤其是膜层强度问题。设计出了硒化锌基底上2～16μm的多层超宽带增透膜,并采用离子束辅助沉积工艺在硒化锌基底上进行了多次实验,并对所使用的氟化钇(YF_3)和硒化锌膜料进行了分析,发现YF_3在3400和1640 cm^(-1)两个波数处的吸收峰。通过将低折射率层改为氟化钡和氟化钇的组合层后,在硒化锌基底上成功镀制出了多层宽带增透膜并采用脉冲电弧离子镀技术在多层薄膜的表面镀制了一定厚度的类金刚石(DLC)薄膜,增强了膜层的强度。最终使硒化锌基底上镀制的超宽带增透膜在2～16μm范围内的平均透射比大于93%,峰值透射比大于97%,并且膜层的强度较好。Zinc selenide（ZnSe） is widely used for infrared（IR） optical systems because of its wideband transmission region.However as a substrate,it is very difficult to deposit ultrabroad band multilayer antireflection（MLAR） coatings in IR region,especially for the durability.2～16μm ultrabroad band MLAR coatings on ZnSe are designed and produced many times by ion beam assisted electron-beam deposition.The absorption rate of YF_3 at 3400 and 1640 cm^（-1） is found by deposition single ZnSe and YF_3 films on Ge substrate.Finally,2～16μm ultrabroad band MLAR coatings are deposited by using BaF_2 and YF_3 as the low-index materials.DLC films are deposited on external MLAR coatings by pulsed vacuum arc ion deposition.The measured results show that the average transmittance is greater than 93%,the peak transmittance is higher than 97%and the durability,stability are both advanced.

关 键 词：光学薄膜 超宽带增透膜 离子束辅助沉积 硒化锌 类金刚石薄膜 

分 类 号：O484[理学—固体物理]