射频功率对筒状聚酯内壁类金刚石薄膜结构与性能的影响研究  

Growth and Properties of Diamond-Like Carbon Films on Inner Walls of Polythylene Terephthalate Tube

作　　者：李景[1] 田雷[1] 田修波[1] 巩春志[1] 杨士勤[1] 

机构地区：[1]哈尔滨工业大学材料学院现代焊接生产技术国家重点实验室,哈尔滨150001

出　　处：《真空科学与技术学报》2010年第3期311-315,共5页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金(50773015);国家自然科学基金(10905013);新世纪优秀人才支持计划(NCET-05-0349);哈尔滨市科技创新人才研究专项基金(2006RFXXS012)

摘　　要：利用偏压/射频耦合等离子体增强化学气相沉积技术在聚对苯二甲酸乙二醇酯(简称聚酯,PET)筒内壁制备了类金刚石薄膜(DLC)。采用X射线光电子能谱、扫描电子显微镜、三维表面轮廓仪、紫外/可见光分光光度计和气体渗透率测试仪考察了射频功率对类金刚石薄膜的结构、沉积速率、表面形貌、光学透过率和气体阻隔性能的影响。结果表明,膜层沉积可有效阻挡近紫外区域的光线,同时对O2,CO2的阻隔能力明显提高,这是由于DLC膜层的致密性质以及PET表面原有缺陷的覆盖。与未镀膜PET相比,150 W时制备的DLC膜的气体透过率分别从58.5,61.7cm3m-2atm-1d-1降低至0.7,1.5 cm3m-2.atm-1d-1,相应的对O2,CO2的阻隔率分别可以提高80倍和40倍。The diamond-like carbon （DLC） films were coated by RF/DC plasma-enhanced chemical vapor deposi- tion （DC-RF-PECVD） on the inner walls of a polythylene terephthalate （PET） tube. The impacts of the RF power on properties, including surface morphologies, microstructures, optical transmittance, gas permeability as well as the deposition rate of the film were studied. The DIE films were characterized with X-ray photoelectron spectroscopy, scanning electron microscopy, ultraviolet infrared spectroscopy and the conventional probes. The results show that the fairly compact DLC films, grown at 150W on PET substrate, considerably block near UV light and improve the gas barrier property for O2 and CO2. For example,after DLC coating,the permeability of O2 and CO2 drops from 58.5cm3m-2atm-ld-1 and 61.7cm3 m-2 atm-1. d - 1 to 0.7cm3m- 2 atm- 1 d - 1 and 15.7em3m- 2 arm- 1 d - 1, respectively. Moreover, the corresponding O2 and CO2 transmis- sion rates decrease by 80 and 40 times, respectively.

关 键 词：等离子体增强化学气相沉积 类金刚石薄膜 射频功率 气体透过率 

分 类 号：O485[理学—固体物理]