用于微器件装配的微操作系统  

A MICROMANIPULATOR SYSTEM FOR ASSEMBLYING MICRO ELEMENTS

作　　者：郑巍[1] 徐毓娴[1] 李庆祥[1] 

机构地区：[1]清华大学精密仪器与机械学系

出　　处：《机器人》1999年第1期12-15,共4页Robot

基　　金：国防九五科研项目

摘　　要：微器件装配技术是微机械的关键技术之一，本文从微器件装配系统的特性和功能出发，提出了一套用于微装配的微操作系统设计方案，并对系统各个组成部分进行分析。Microassembly is one of the key factors for micro electro mechanical systems. In this paper, a manipulator system for assemblying micro elements which is based on the properties and requirments of microassembly technology is presented. Design features of each components of this system are described and the methods to achieve these features are analysed.

关 键 词：微器件 装配 微机械 微操作系统 

分 类 号：TH－39[机械工程]