一种金属基聚合物电热微驱动器的设计与仿真  

Design and Simulation of Polymeric Out-of-plane Electrothermal Actuator Embedded with Metal

作　　者：吴义伯[1] 丁桂甫[1] 张小波[1] 王亚攀[1] 张丛春[1] 

机构地区：[1]上海交通大学微纳科学技术研究院,上海200240

出　　处：《系统仿真学报》2010年第7期1752-1756,共5页Journal of System Simulation

基　　金：国家自然科学基金(50675139);国家高技术研究发展计划"863"项目(2007AA04Z338);教育部培育基金项目(708037)

摘　　要：提出了一种用于双稳态MEMS继电器的面外运动金属基聚合物电热微驱动器,下层结构使用了环氧树脂型SU-8胶作为驱动层,中间层为蛇形镍电阻丝发热层,上层结构为金属偏置层,构成的多层膜结构在常温下保持悬空部分平直,通电时产生的焦耳热使微驱动器件发生面外运动。先对设计的微驱动器进行了概念分析,再利用ANSYSTM有限元分析软件的多物理场(电-热-机械耦合)对热驱动器的性能进行了仿真与优化。当SU-8驱动层厚度、热电阻丝厚度、偏置层厚度比分别为12:4:4μm时,所设计器件的驱动性能最佳,即在0.4V驱动电压下,响应时间10ms时微驱动器产生驱动位移28μm,输出力为1mN,功耗为10mW。A new polymeric out-of-plane electrothermal microactuator embedded with metal was proposed.The microactuator consists of a passive Nickel layer and a functional expanding SU-8 layer,packaging with a winding S-shaped Ni heater.When exciting with a pulse current,the multilayer actuator is able to maintain a suspended structure to produce an out-of-plane movement vertical to the substrate.The proposed device is conceptually advanced.By means of finite element（FE） simulation with ANSYSTM multi-physical coupling module（electro-thermal-structure）,the geometric structure is optimized and electrothemal capabilities are determined theoretically.When the high ratio of actuating SU-8 layer,heating layer and passive Ni layer is 12：4：4 μm,the actuation capabilities will obtain to the maximum.That is,under 0.4V driving voltage the displacement of the prepared actuator is 28μm in the 10ms response time,output force 1mN,and power consumption 10mW,respectively.

关 键 词：面外运动 电热驱动 双层膜效应 SU-8 优化仿真 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术]