全玻璃SS-AlN金属陶瓷真空太阳集热管  

All-glass vacuum solar collector tubes incorporating sputtered SS-AlN cermet solar coatings

作　　者：章其初[1] 陈革[1] 王双[1] 池华敬[1] 周旭[1] 孟秀清[1] 

机构地区：[1]皇明太阳能股份有限公司镀膜研究所,山东德州253000

出　　处：《真空》2010年第4期27-32,共6页Vacuum

摘　　要：不锈钢-氮化铝(SS-AlN)金属陶瓷太阳选择性吸收涂层于1995年在实验室制备成功,采用真空磁控溅射沉积。太阳吸收复合膜采用干涉吸收型膜层结构,由不同金属含量的两层金属陶瓷层组成吸收层。金属陶瓷吸收层采用在镀膜室中SS和Al金属靶,在溅射气体Ar和反应气体N2中同时溅射运行,SS靶非反应溅射沉积SS金属组分,Al靶反应溅射沉积AlN陶瓷组分。实验室沉积的SS-AlN吸收涂层的太阳吸收比高达94%～96%,室温辐射比3.5%～4.0%。皇明公司2001年开始产业化生产全玻璃SS-AlN真空太阳集热管。我们开发了立式集热管连续镀膜线,第一条镀膜线于2007年调试成功,投入生产。集热管镀膜线真空系统长约41 m,高约3 m。每条线日产约为1.8～2.0万支。The stainless steel-aluminium nitride（SS-AlN） cermet solar selective coatings using vacuum magnetron sputtering were initially researched in laboratory in 1995.The cermet absorber layer of the solar coatings with a double cermet layer film structure incorporating two distinct cermet layers has been used.The SS-AlN cermet solar coatings were deposited by a novel two-metallic-target magnetron sputtering method.The ceramic and metallic components in the cermet are simultaneously deposited by sputtering;the AlN ceramic component is deposited by reactive sputtering and the SS metallic component by no reactive sputtering.A solar absorptance of 94%～96% and emittance of 3.5%～4.0% at room temperature were achieved using a laboratory vacuum coater.The Himin Solar Company has mass-produced the solar collector tubes incorporating sputtered SSAlN cermet solar coatings since 2001.We have successfully developed in-line vertical sputter coater for coating the SS-AlN cermet selective surfaces on glass tubes.The first in-line vertical sputter coater for mass-production of the SS-AlN cermet vacuum solar collector tubes has been constructed and successfully operated in 2007.The vacuum chamber system has around 41m length and 3m height.The production capacity of the in-line coater is 18～20 thousands tubes a day.

关 键 词：真空太阳集热管 太阳吸收涂层 金属陶瓷 磁控溅射 镀膜机 集热管镀膜线 

分 类 号：TB43[一般工业技术]