静电驱动压阻检测微机械陀螺仪的研究  

Research on Micromachined Gyroscope with Electrostatic Drive and Piezoresistive Detection

作　　者：王瑞荣[1] 杜康[1] 石云波[1,2] 刘俊[1,2] 

机构地区：[1]中北大学电子测试技术国家重点实验室,山西太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《测试技术学报》2010年第4期334-338,共5页Journal of Test and Measurement Technology

基　　金：国家自然科学基金资助项目(50675212)

摘　　要：对静电驱动压阻检测微机械陀螺仪进行了结构设计并对工作原理进行了介绍.与硅压阻器件相比,本文利用多势垒纳米膜所具有的压阻效应作为检测方式,实现了较高的压阻灵敏度;采用硅基异质外延砷化镓薄膜工艺进行陀螺结构以及多势垒纳米膜器件的加工,较好地实现了工艺的兼容.通过对结构进行模态仿真,确定了陀螺的固有频率.The structure design and working principle of the micromachined gyroscope based on both the electrostatic drive and the piezoresistive detection were introduced. Comparing with the traditionally used silicon piezoresistive devices, the multi-barrier nano-film showed a higher piezoresistive sensitivity. Process compatibility was implemented by fabricating the gyroscope structure and multi-barrier nano-- film with heteroepitaxy GaAs film on Si substrate. The natural frequencies of gyroscope were calculated by modal analysis of FEM.

关 键 词：静电驱动 压阻检测 结构设计 微机械陀螺 加工工艺 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]