Al掺杂ZnO薄膜的微结构及光学特性研究  

Study on the micro-structural and optical properties of Al doped ZnO films

作　　者：孟军霞[1] 马书懿[1] 陈海霞[1] 陶亚明[1] 侯丽莉[1] 贾迎飞[1] 尚小荣[1] 

机构地区：[1]西北师范大学物理与电子工程学院,甘肃兰州730070

出　　处：《功能材料》2010年第8期1317-1320,共4页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(10874140);甘肃省自然科学基金资助项目(0710RJZA105)

摘　　要：采用射频磁控溅射方法在玻璃衬底上制备出不同Al掺杂量的ZnO(AZO)薄膜。利用X射线衍射(XRD)、扫描电子显微镜(SEM)和光致荧光发光(PL)等系统研究了不同Al掺杂量对ZnO薄膜的结晶性能、表面形貌和光学特性等的影响。结果显示,随着Al掺杂量的增加,薄膜的(002)衍射峰先增强后减弱,同时出现了(100)、(101)和(110)衍射峰,表明我们制备的AZO薄膜为多晶纤锌矿结构,适量的Al掺杂可提高ZnO薄膜的结晶质量,然而AZO薄膜的表面平整、晶粒致密均匀。薄膜在紫外-可见光范围的透过率超过90%,同时随着Al掺杂量的增加,薄膜的光学带隙值先增大,后减小。这与采用量子限域模型对薄膜的光学带隙作出相应的理论计算所得结果的变化趋势完全一致。Al-doped ZnO （AZO） thin films with different Al contents were deposited on glass substrates using the radio frequency reactive magnetron sputtering technique.The crystallinity,surface images and optical properties in AZO films were systematically investigated by X-ray diffraction （XRD）,scanning electronic microscopy （SEM）,and fluorescence spectrophotometer.As the Al-doping content increased,the intensity of （002） diffraction peak first increased and then decreased,and there occurred new weak （100）,（101） and （110） diffraction peaks,which indicated that AZO films were polycrystalline with a structure that belonged to the ZnO hexagonal wurtzite type.While the surface roughness of the AZO films was smoother and the crystal grains of AZO films was more even.All films had an average optical transparency over 90% in the visible range,meanwhile the optical band gaps first increased then decreased as Al content further increased.The optical band gaps calculated based on the quantum confinement model are in good agreement with the experimental values.

关 键 词：磁控溅射法 AZO薄膜 结构特性 光学特性 量子限域 

分 类 号：O484.4[理学—固体物理] O484.5[理学—物理]