利用压电换能器电信号检测引线键合质量  

Quality Detection of Wire Bonding Using Ultrasonic Electrical Signal of Piezoelectric Transducer

作　　者：冯武卫[1] 孟庆丰[1] 谢友柏[1] 

机构地区：[1]西安交通大学润滑理论及轴承研究所,西安710049

出　　处：《西安交通大学学报》2010年第9期64-68,共5页Journal of Xi'an Jiaotong University

基　　金：国家自然科学基金资助项目(50475087;50875196)

摘　　要：以引线键合系统超声波发生器电信号作为检测键合质量的信息载体,研究了超声电信号的特征提取方法以及在键合质量检测方面的应用.针对超声电信号的瞬态特性,提出一种基于包络分段的特征提取方法,该方法以瞬态键合过程的发生、发展和完成为分段依据,将超声电信号包络分成信号上升、稳定和衰减3个阶段,并提取每个阶段能够反映键合质量的波形特征来表征键合过程.为了消除特征中的冗余信息并实现特征降维,采用主分量分析技术进行特征选择,通过实验数据的分析,有效地识别出了正常键合、无引线键合和根部脱落键合的状态,为引线键合质量的检测提供了一条新途径.Using the electrical signal from the ultrasonic generator as the information carrier for detecting the bonding quality,the feature extraction method of ultrasonic electrical signal in bonding quality detection is investigated.A new feature extraction method based on the segmentation envelope is proposed for characterizing the transient ultrasonic electrical signal.According to the happening,developing and completing stages of a bonding process,the envelope of ultrasonic electrical signal is separated into three phases,namely envelope rising phase,stable phase,and damping phase.The waveform features are extracted from each phase of the envelope for further bonding quality detection.To remove the irrelevant information and reduce the dimension of original feature variables,the principal component analysis method is adopted for the feature selection,thus the data acquired from several different bonding conditions such as normal bonding,wire break bonding and peeled-off bonding are identified,and the result demonstrates the effectiveness.

关 键 词：引线键合 超声电信号 特征提取 主分量分析 键合质量 

分 类 号：TN605[电子电信—电路与系统]