气体探测用低功耗微型加热器研究  

A Low Power Consumption Microhotplate for Gas Detection

作　　者：许磊[1] 李铁[1] 高秀丽[1] 王跃林[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室微系统技术国家级重点实验室,上海200050

出　　处：《测试技术学报》2010年第5期410-413,共4页Journal of Test and Measurement Technology

基　　金：国家重点基础研究发展计划(973)资助项目(2006CB300403);国家高技术研究发展计划(863)资助项目(2007AA03Z308);国家自然基金委创新团队资助项目(60721004)

摘　　要：介绍了一种基于MEMS技术的可用于气体探测的低功耗微型加热器.通过结构优化和工艺参数控制实现了一种低功耗和高机械强度加热器的设计与制作.该加热器采用悬膜式结构,中心加热膜区通过4根细长的悬梁与衬底框架相连,铂电阻丝作为加热元件以折线的形式排列在中心膜区上,采用硅各向异性腐蚀液正面释放薄膜,并在薄膜下方形成倒金字塔型的隔热腔体.测试结果表明,加热器在400℃时功耗仅为26 mW,且加热器的升温响应时间小于5 ms,降温响应时间小于2 ms.This paper introduces a low power consumption microhotplate for gas detection based on MEMS technology.Through structure optimization and process parameters control,a low power consumption and high mechanical strength microhotplate has been designed and fabricated.The heating area of the suspended membrane microhotplate is connected to the bulk substrate via four slender beams with a serpentine Pt resistor on it.The membrane is released by front silicon anisotropic etching,with a deep inverted pyramid groove for thermal isolation formed under the membrane.Test results indicate that the power consumption of the microhotplate is only 26 mW when heated up to 400 ℃.And it has a heating response time 〈5 ms,and cooling response time 〈2 ms.

关 键 词：MEMS 低功耗 微型加热器 铂 各向异性腐蚀 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]