用于微机械器件的电镀Fe-Ni合金薄膜的研究  

ELECTRODEPOSITED Fe-Ni ALLOY FILMS FOR MEMS APPLICATIONS

作　　者：陈垚[1] 王渭源[1] 

机构地区：[1]中国科学院上海冶金研究所,上海200050

出　　处：《功能材料与器件学报》1999年第2期147-151,共5页Journal of Functional Materials and Devices

摘　　要：本文考察了非常规Ｆｅ－Ｎｉ合金电镀中，溶液浓度、电流密度、ｐＨ值和温度等因素对电镀的影响。实验结果表明，Ｆｅ－Ｎｉ合金电镀的异常性是由于Ｆｅ（ＯＨ）２对铁离子和镍离子的还原反应有着不同的阻碍作用和阻碍程度。用Ｘ射线平移法对Ｆｅ－Ｎｉ合金镀层的残余应力与电镀参数之间的关系进行了研究。并讨论了薄膜微结构与内应力的关系。The effects of bath composition, current density, pH Value, temperature etc. on the anomality ofelectrodeposition of Fe-Ni alloy were investigated. The anomality can be interpreted by the differentimpedement action and degree of Fe(OH)2 on the discharge of iron and nickel ions. The dependenceof films stress of Fe-Ni alloy on the electrodeposition parameters was studied by X-ray translationmethod. The results were discussed in terms of the existing relationship between the films stress andthe corresponding microstructures of deposit.

关 键 词：合金电镀 薄膜 异常电镀 内应力 微机械 

分 类 号：TH－39[机械工程] TQ153.2[化学工程—电化学工业]