三自由度精密定位工作台的设计与仿真  

Design and Simulation of a 3-DOF Micro-positioning Worktable

作　　者：王宏峰[1] 陈道炯[1] 刘巍[1] 

机构地区：[1]上海理工大学机械工程学院,上海200093

出　　处：《压电与声光》2010年第5期803-806,共4页Piezoelectrics & Acoustooptics

基　　金：上海市教委重点学科建设基金资助项目(J50503)

摘　　要：设计一种以压电陶瓷为驱动,通过柔性机构放大输出位移的精密定位工作台。给出了该精密定位工作台的结构模型,建立了精密定位工作台的位置输入输出方程,分析和计算了柔性铰链微位移放大机构的位移放大倍数。通过仿真确定工作台各自由度的变形量与压电陶瓷驱动器伸缩量之间的关系与运动特性。结果表明,该精密定位工作台能实现定位误差为0.1μm的高精度定位。通过与3点支撑微位移放大机构工作台的比较,显示出4点支撑微位移放大机构工作台可减小交叉耦合的影响。A micro-positioning worktable drived by PZT was put forward.This worktable was guided by flexure hinge mechanism and could realize the precision positioning.The displacement magnification coefficient of the micro-displacement magnifying mechanism with flexure hinge was calculated.The input-output equations of the micro-positioning stage were given,and the relationship between the output variables of the precision positioning worktable and the deflection of piezoelectric actuator was established.Results concluded that the worktable can realize high precision positioning as 0.1 μm.Compared with the three knighthead micro positioning worktable shows that the four knighthead micro-positioning worktable can reduce the effect of cross coupling.

关 键 词：柔性铰链 微动工作台 压电陶瓷驱动器 微位移放大机构 

分 类 号：TH122[机械工程—机械设计及理论]