解耦硅微陀螺仪的结构误差分析和系统性能测试(英文)  

Structure Error Analysis and System Performance Test of Decoupled Silicon Micro-Gyroscope

作　　者：杨波[1,2] 王寿荣[1,2] 李宏生[1,2] 黄丽斌[1,2] 李坤宇[1,2] 殷勇[1,2] 

机构地区：[1]东南大学仪器科学与工程学院,南京210096 [2]微惯性仪表与先进导航技术教育部重点实验室,南京210096

出　　处：《纳米技术与精密工程》2010年第6期545-552,共8页Nanotechnology and Precision Engineering

基　　金：教育部博士点新教师基金资助项目(200802861063);船舶工业国防预研基金资助项目(6922001045);航空基金资助项目(20090869007)

摘　　要：为了研究对称解耦的硅微陀螺仪的性能,对其结构误差进行了分析,并对其系统性能进行了测试.利用全解耦硅微陀螺仪的简化运动模型,分析了由弹性梁梁宽误差导致的机械耦合误差,并推导其公式.利用有限元方法,对机械耦合误差进行了仿真.仿真结果表明,当悬臂梁的加工误差在0～0.4μm间变化时,机械耦合误差变化范围为0～62.88°/s;同时仿真结果和计算结果比较显示,机械耦合误差的仿真结果基本与理论公式的计算结果相符,证明理论分析的正确性.对机械耦合误差进行了测试,测试结果表明,全解耦硅微陀螺仪的机械耦合误差仅为31°/s,相比课题组前期的半解耦硅微陀螺仪缩小了13.9倍.系统性能实验结果表明,由于机械耦合误差的减小,全解耦硅微陀螺仪的零偏温度系数仅为57.68°/(h.℃),相比课题组前期的半解耦硅微陀螺仪缩小了9.42倍.In order to study the performance of the symmetrically decoupled silicon micro-gyroscope（DSMG）,its structure error was analyzed and the system performance was tested.On basis of the simplified motion model of DSMG,the mechanical coupling error caused by the width error of suspension beams was analyzed and its equation was deduced.Finite element method was used to simulate the mechanical coupling error of DSMG,results of which indicate that,when the width error of suspension beams varies between 0 and 0.4 μm,the variation range of mechanical coupling error is from 0 to 62.88 °/s.Comparison of the simulated values of mechanical coupling error with the theoretical calculation values shows that the simulation results are in agreement with the calculation results,which verifies the correctness of the theoretical analysis of the mechanical coupling error.Test results of DSMG show that the equivalent input rate of mechanical coupling error is only 31°/s,13.9 times smaller than that of the partially decoupled SMG developed by our research group previously.The system performance experiment results show that,due to the reduction of the mechanical coupling error,the zero bias temperature coefficient of DSMG decreases to 57.68 °/（h·℃）,9.42 times smaller than that of the previously developed partially decoupled SMG.

关 键 词：全解耦硅微陀螺仪(DSMG) 机械耦合误差 弹性梁 零偏输出漂移 

分 类 号：U666.123[交通运输工程—船舶及航道工程]