压电驱动器迟滞建模与开环控制实验研究  

The Hysteresis Modeling of Piezoelectric Actuator and Experimental Study on Its Open-loop Control

作　　者：胡小根[1] 李玉和[1] 林浩山[1] 童晓蕾[1] 祁鑫[1] 

机构地区：[1]清华大学精密仪器与机械学系精密测试技术及仪器国家重点实验室,北京100084

出　　处：《压电与声光》2010年第6期999-1001,共3页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(50705051)

摘　　要：压电位移扫描技术可实现纳米级位移分辨率,但其迟滞现象会降低系统测量精度。该文依据大量实验现象中压电驱动器迟滞存在点对称性特征,建立了一种压电驱动器迟滞的数学模型。本模型由实验数据拟合上升主回线,再根据压电驱动器的点对称性,计算出其他上升或下降回线,同时得到其逆模型。利用逆模型对压电驱动器进行开环控制实验结果表明,实验系统控制误差范围为-36^+47 nm。The piezoelectric displacement scanning technology can achieve nanometer resolution.However,the significant reduction of accuracy is brought because of the hysteresis.Based on the point symmetry characteristic in the hysteresis of the piezoelectric actuator from lots of experiments,a mathematical model of the hysteresis of the piezoelectric actuator has been established.This model fitted the ascending major branch based on the experimental data.Then we achieved the other descending or ascending branches according to the coincidence and point symmetry characteristics.At the same time the reversal model was obtained.The experiment of the open loop control on the piezoelectric actuator based on the inverse model showed that the control error range was between-36 nm and ＋47 nm.

关 键 词：压电驱动器 迟滞 开环控制 

分 类 号：TN384[电子电信—物理电子学] TP391.9[自动化与计算机技术—计算机应用技术]