有滞留时间约束的集束型装备在线调度问题研究  

Online scheduling problem of cluster tools with residency time constraints

作　　者：李林瑛[1,2] 胡静涛[1] 

机构地区：[1]中国科学院沈阳自动化研究所工业信息学重点实验室,沈阳110016 [2]中国科学院研究生院,北京100039

出　　处：《控制与决策》2011年第1期37-43,48,共8页Control and Decision

基　　金：沈阳市科技计划项目(108155-2-00)

摘　　要：针对半导体制造中有滞留时间约束的集束型装备,研究了临时晶圆到达时的在线调度问题,描述了调度问题域,建立了问题的数学模型,并根据模型提出了两层调度方法.外层算法通过粒子群优化过程求解临时晶圆的加工顺序;内层算法在给定加工顺序的基础上,采用前向和后向递推方法获得可行解空间,并从可行解空间获得最优完工时间.从理论上证明了算法的可行性,并通过仿真结果表明,该方法对求解大规模临时晶圆的调度问题是十分有效的.For cluster tools with residency time constraints in semiconductor manufacturing, the online scheduling problem is addressed when temporary wafer arrives. On the basis of the statement domain of scheduling problem, mathematical formulations of the scheduling problems are presented. The two-layer method is proposed. The outer-layer algorithm denotes to solve the processing order of temporary wafer by particle swarm optimization, while the inner-layer one determines the start time of each station based on the given order by using the two-stage recursion method. The feasibility of the inner algorithm is proved theoretically. The simulation results show that the proposed method is effective for solving the largescale scheduling problem of temporary wafer.

关 键 词：半导体制造 集束型装备 在线调度 粒子群优化算法 滞留时间约束 

分 类 号：TP241.2[自动化与计算机技术—检测技术与自动化装置] TP278[自动化与计算机技术—控制科学与工程]