硅微机械陀螺接口检测技术的研究  

An Investigation into Interface Detection Technology for Micromachined Si Gyroscopes

作　　者：李万玉[1] 阮爱武[2] 罗晋生[3] 冯培德 

机构地区：[1]航空工业总公司第618研究所,陕西西安710065 [2]西北工业大学自动控制系,陕西西安710072 [3]西安交通大学电子与信息学院,陕西西安710049

出　　处：《微电子学》1999年第5期343-346,共4页Microelectronics

摘　　要：研究了微陀螺的电容变化率为10-7～10-8时的微弱输出信号的检测技术,这是微机械器件研制中具有普遍性的技术难点。在研究检测微小电容变化量的积分电路的基础上,进一步采用了可抑制低频噪声和漂移的相关双采样技术,以及抑制由开关电荷注入引起的误差的技术。The sensing technology for weak output signals in detection circuitry of gyroscopes whose capacitance change rate ranges from 10 -7 ～10 -8 is investigated, which is a technical challenge for micromachined devices Based on the integrator of basic readout approach, improved sensing strategies with correlated double sampling are adopted, which can suppress low frequency noises and offset, and cancel charge injection induced by switches These novel technical ideas and schemes are expected to satisfy the requirements for detecting the capacitance change rate ranging from 10 -7 ～10 -8

关 键 词：微机械器件 硅微加速度计 微陀螺 相关双采样 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计] TH－39[机械工程]