化学气相沉积硫化锌中六方相形成机制及抑制方法分析  

Form mechanism and restrain method of hexagonal in CVDZnS

作　　者：付利刚[1,2] 霍承松[2] 张福昌[2] 魏乃光[2] 王学武[2] 吕反修[2] 

机构地区：[1]北京科技大学材料科学与工程学院,北京100088 [2]北京有色金属研究总院北京国晶辉红外光学科技有限公司,北京100088

出　　处：《红外与激光工程》2010年第6期1100-1104,共5页Infrared and Laser Engineering

基　　金：军工配套项目

摘　　要：六方相ZnS由于光学上的各相异性而在不同晶相上具有不同的折射指数。立方相化学气相沉积硫化锌(CVDZnS)中的六方杂相加大了对入射光线的散射,严重影响材料本身的光学性能。通过不同实验条件下的对比,对促成立方相形成的机制进行了探讨和分析,证实了六方相的形成主要受沉积温度、沉积压力、Zn/H2S 3个沉积参数的影响。有针对性地提出了综合利用适当提高沉积温度、Zn/H2S和降低沉积压力等方式来抑制六方相生成的方法,制备出不含六方杂相且各向同性的CVDZnS。样品的红外透过率在近红外及中红外波段得到了改善。Hexagonal ZnS is optically anisotropic and it has a different refractive index in different directions.As the impurity phase in cubic CVDZnS,hexagonal phase increases the scattering of incident light which does harm to the optical quality of cubic CVDZnS.In this paper,the form mechanism of hexagonal phase with different experiment parameters was discussed and analyzed.It was proved that the form of hexagonal phase was sensitive to three processing parameters： depositing temperature,Zn/H2S and depositing press.By increasing the depositing temperature,Zn/H2S,depressing depositing press oppropriately,the form of hexagonal ZnS was restrained and the isotropic cubic CVDZnS without impurity phase was produced.The specimen without hexagonal phase has a higher infrared transmittance especially in short wavelength infrared and midwavelength infrared.

关 键 词：形成机制 抑制方法 六方相ZnS 立方相ZnS 

分 类 号：TN213[电子电信—物理电子学]