基于MEMS的新型高场不对称波形离子迁移谱仪  

High-Field Asymmetric Waveform Ion Mobility Spectrometry Based on MEMS

作　　者：陈池来[1,2] 赵聪[1,2] 王电令 程玉鹏 孔德义[1] 王焕钦 高钧 高理升 林新华[1] 王英先 殷世平 张瑞[1] 

机构地区：[1]中国科学院合肥智能机械研究所传感技术国家重点实验室,合肥230031 [2]中国科学技术大学精密机械与精密仪器系,合肥230027

出　　处：《微纳电子技术》2011年第2期112-117,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61004133;60871037);中国科学院合肥物质科学研究院知识创新工程领域前沿项目

摘　　要：简要回顾了离子迁移谱技术的发展历程,叙述了常规离子迁移谱的局限性。阐述了基于MEMS工艺的新型高场不对称波形离子迁移谱技术,该技术以物质离子的离子迁移率在高场下的非线性变化特性为基础,可实现对物质离子的空间分离。以MEMS技术为主体,自主研发了高场不对称波形离子迁移谱仪,并对挥发性有机物、苯系物、爆炸物和农药等样品进行了检测,结果表明该离子迁移谱仪能够对苯、丙酮、对二甲苯、爆炸物梯恩梯和农药硫丹等物质实现快速、高分辨和高灵敏度检测,检测精度达10-9量级,线性度达0.95。该结果展示了其在物质离子分离检测方面的巨大潜力,以及在环境、食品安全和生物大分子等领域的优越性和前景,其研究成果将推动下一代物质离子分离检测技术的发展。The development history and shortcomings of ion mobility spectrometry（IMS）are reviewed briefly.Then,as a novel gas ion separation MEMS technology,the high-field asymmetric waveform ion mobility spectrometry（FAIMS）based on the nonlinear characteristics of ions mobility under a high-field was discussed.The acetone,benzene,TNT,paraxylene and Benzoepin were separated and detected by self-prepared FAIMS apparatus made by MEMS manufacturing technology.The results demonstrate that the five samples can be separated and detected with high efficiency,resolution and sensitivity by FAIMS.The linear regression curve of the detection current with the benzene concentration shows that the measure accuracy is 10-9 order with the linearity of 0.95.Besides that,it indicates a great promising application prospect in ion separation and detection,environment and food safety,biological macromolecules and other fields,and will promote the development of the next generation ion separation and detection technology.

关 键 词：高场不对称波形离子迁移谱 非线性离子迁移率 微电子机械系统 离子迁移谱 快速检测 

分 类 号：TH703[机械工程—仪器科学与技术] TL817[机械工程—精密仪器及机械]