PECVD法制备类金刚石薄膜的摩擦学性能  

Tribological Properties of Diamond-like Carbon Films Deposited by PECVD

作　　者：王庆良[1] 孙彦敏[1] 张磊[1] 

机构地区：[1]中国矿业大学材料科学与工程学院,徐州221116

出　　处：《材料研究学报》2011年第1期73-78,共6页Chinese Journal of Materials Research

基　　金：国家重点基础研究发展计划2007CB607605;清华大学摩擦学国家重点实验室开放基金SKLTKF08A01资助项目~~

摘　　要：采用射频等离子体增强化学气相沉积法(rf-PECVD),在45钢表面沉积了类金刚石(DLC)薄膜,借助激光拉曼光谱仪(Raman)、X射线光电子能谱(XPS)、扫描电子显微镜(SEM)和原子力显微镜(AFM),分析了DLC膜的键结构、表面形貌和结构特征,用原位纳米力学测试系统测定了薄膜的硬度。以GCr15钢为摩擦副材料,用UMT-Ⅱ摩擦磨损实验机考察了不同载荷和滑行速度条件下DLC膜的摩擦磨损性能,并分析了磨损机理。结果表明,在45钢表面沉积的薄膜具有典型的类金刚石薄膜的结构特征,薄膜表面由致密的纳米级颗粒组成,具有较高的硬度。在各种摩擦磨损实验条件下DLC薄膜表现出良好的抗磨损性能,摩擦系数均明显比45钢的低,尤其在高速低载下摩擦系数低至0.008。Diamond-like carbon （DLC） films were prepared on the surface of 45 steel substrates by the radio-frequency plasma enhanced chemical vapor deposition （rf-PECVD） technique. The bond structure, surface morphology and microstructure of DLC film were characterized with a laser Raman spectroscopy （Raman）, X-ray photoelectron spectroscopy （XPS）, scanning electron microscopy （SEM） and atomic force microscope （AFM）. The hardness of DLC film was determined by the tribo-indenter in - situ nano-mechanical test system. Tribological behaviors of DLC film against GCr15 steel were performed using a UMT- II friction and wear tester under the various normal loads and sliding speeds. And the wear mechanisms were also analyzed. The experimental results showed that the thin film deposited on the surface of 45 steel has the typical structural characteristics of DLC film. The surface of DLC film composes of the compact nano-particles, which has the higher hardness than that of the 45 steel substrates. Under the different tribological conditions, DLC film showed the higher wear-resistance and lower friction coefficient compared with the 45 steel substrates. Especially in the high-speed and low-load conditions, the friction coefficient was lower than 0.008.

关 键 词：材料表面与界面 等离子增强化学气相沉积 类金刚石膜 XPS 摩擦磨损 

分 类 号：TB383[一般工业技术—材料科学与工程]