MEMS永磁振动发电机的设计、制作和测试  

Design,fabrication and performance test of a micromachined permanent magnet vibration-based power generator

作　　者：王佩红[1,2] 赵小林[1] 戴旭涵[1] 汪忠柱[2] 

机构地区：[1]上海交通大学微纳科学技术研究院,上海200240 [2]安徽大学物理与材料科学学院,安徽合肥230039

出　　处：《信息与电子工程》2011年第1期96-100,共5页information and electronic engineering

基　　金：国家自然科学基金资助项目(51007001和50977056)

摘　　要：提出了一种基于微电子机械系统技术的微型永磁振动发电机。该发电机能够采集自然界中存在的机械振动能并转换成电能。它主要包括1个固定的双层铜线圈和1个由永磁体和硅基平面弹簧构成的拾振系统。采用体硅微加工和微电镀技术制作硅基平面弹簧和微线圈。组装成功的样机A和样机B的区别在于线圈的尺寸不同。样机B中线圈面积为样机A中线圈面积的28%。测试表明,样机A和B的固有频率分别为222 Hz和247 Hz。在加速度为1 g的振动激励下,样机A在共振状态下产生的最大感应电压和最大负载功率分别为51 mV和5.89μW。但是,在相同的振动激励下,样机B产生的最大感应电压和最大负载功率分别为62 mV和6.4μW,相对于样机A,分别提高了21.6%和8.7%。文中最后对线圈尺寸不同引起的输出性能不同给予了解释。This paper presents a permanent magnet vibration-based power generator based on Micro Electro Mechanical Systems（MEMS） technology.It can scavenge vibration energy and convert it into electrical power.It includes a fixed micro coil and a movable permanent magnet attached on a nickel planar spring integrated with silicon frame.The two-layer copper micro coil and nickel planar spring on silicon are fabricated using bulk-silicon micromachining and microelectroplating technique.Two prototypes with different coils and same magnet-spring system are assembled and tested.Prototype A can generate maximal load voltage of 51 mV and load power of 5.89 μW at 222 Hz resonant frequency and 9.8 m/s2 acceleration.At the resonant frequency of 247 Hz,prototype B generates maximum load voltage of 62 mV and load power of 6.4 μW for acceleration of 9.8 m/s2.The coil＇s area of 6.25 mm2 in prototype B is only 28% of that of 22.56 mm2 in prototype A,however,the load voltage and load power are increased by 21.6% and 8.6%,respectively.The analysis about the difference of output performance of two prototypes is also given in this paper.

关 键 词：微机电系统 振动发电机 永磁 微加工技术 铜线圈 镍弹簧 

分 类 号：TM313[电气工程—电机]