基于单频激光干涉仪的精密工件台定位系统设计  

Design of Positioning System for Precision Stage Based on Single-frequency Laser Interferometer

作　　者：王蕴[1,2] 薛虹[1] 韩立[1] 

机构地区：[1]中国科学院电工研究所,北京100190 [2]中国科学院研究生院,北京100190

出　　处：《现代科学仪器》2011年第2期49-52,共4页Modern Scientific Instruments

摘　　要：激光干涉仪是以稳频氦氖激光波长为已知长度,利用迈克耳逊干涉系统测量位移的工具。近年来,激光干涉仪一直作为精密测量工具为精密加工机和工件台进行定位校准工作。本文介绍了一种基于单频激光干涉仪的精密工件台测量定位系统。本定位系统采用单频激光干涉仪作为精密测量工具,采用高档8位单片机作为数据处理微控单元,并基于VC++语言编写相关控制软件。实际应用证明本系统定位速度快,精度高,理论上最小分辨率为38.6pm。Laser interferometer makes use of Michelson interference theory measuring displacement based on the length of the He-Ne laser at steady frequency. In recent years, laser interferometer has been used as precision measurement tool for precision machining and precision stage positioning. This paper introduces a precision stage positioning system based on single-frequency laser interferometer. This positioning system used single frequency laser interferometer as the measurement instrument, one 8-bit microcontroller as the micro control unit for processing data, and VC＋＋ as the coding language for developing the control software. The experiments demonstrated that our positioning system is fast and precise and its minimum resolution is 38.6pm in theory.

关 键 词：单频激光干涉仪 精密工件台 精密定位 

分 类 号：TH744.3[机械工程—光学工程]