直接驱动XY平台零相位误差跟踪新型交叉耦合控制  

Zero phase error tracking and novel cross-coupled control for direct drive XY table

作　　者：赵希梅[1] 郭庆鼎[1] 翟惠萍[1] 

机构地区：[1]沈阳工业大学电气工程学院,辽宁沈阳110870

出　　处：《制造技术与机床》2011年第7期83-86,共4页Manufacturing Technology & Machine Tool

基　　金：国家自然青年科学基金项目(50805098);辽宁省科技厅博士科研启动基金项目(20091056);辽宁省教育厅科学研究项目(L2010400)

摘　　要：针对直接驱动XY平台高精密轮廓加工中存在的电气——机械延迟、系统参数不确定性及两轴驱动系统参数不匹配以及扰动等因素影响轮廓加工精度的问题,提出了将零相位误差跟踪控制(ZPETC)与新型交叉耦合控制相结合的策略对两轴的运动进行协调控制,实现跟踪误差与轮廓误差同时减小。ZPETC作为前馈跟踪控制器,提高了快速性,克服了伺服滞后,使系统实现准确跟踪,减小了跟踪误差,进而有利于减小轮廓误差;新型交叉耦合控制作用于两轴之间,将轮廓误差作为直接被控量进行实时补偿控制,特别有效地提高了轮廓精度并简化了控制器设计。仿真和实验结果表明所设计控制系统具有较好的跟踪性和鲁棒性,进而大大提高了跟踪精度和轮廓精度。For the existing problems that influence the precision of the contour machining in direct drive XY table high precision contour machining,such as the electric-machine delay,the uncertainty of the system parameters,parameters unmatched of the double-axis drive system and disturbances and so on,the control strategy combining zero phase error tracking controller（ZPETC） with novel cross-coupling controller is presented to implement coordinate control for double axis and improve tracking error and contour error.ZPETC is served as the feed-forward controller to improve the fast tracking performance of the system and overcome the servo delay,thus the exactly tracking of the system is implemented.The contour error is reduced indirectly by diminishing the tracking error.Novel cross-coupling controller is used to increase the matched degree among axes by real-time compensating contour error that is served as direct controlled variable.Therefore the contour precision is improved effectively and controller design is simplified.The simulation and experimental results show that the proposed control scheme is effective and enhance the tracking performance and robustness of the system.The tracking precise and contour precise are greatly improved.

关 键 词：XY平台 ZPETC 新型交叉耦合控制器 轮廓误差 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]