微机械电容式加速度计的开环工作模式  

OPEN LOOP OPERATING MODE OF MICROMACHINING CAPACITIVE ACCELEROMETER

作　　者：李宝清[1] 陆德仁[1] 王渭源[1] 

机构地区：[1]中国科学院上海冶金研究所传感技术国家重点实验室,上海200050

出　　处：《功能材料与器件学报》1999年第4期281-287,共7页Journal of Functional Materials and Devices

基　　金：攀登计划B资助

摘　　要：在微机械电容式加速度计中利用静电力反馈使加速度计处于闭环力平衡模式工作，能提高加速度计的线性度。本文阐述了静电力在开环工作模式中的作用，导出了相关的灵敏度公式，报导了实验结果和成功地将原闭环工作的±１ｇ 量程加速度计直接变为低量程的微机械电容式加速度计的实例，其量程为±０．０１ｇ，线性度优于０－２ ％ 。Electrostatic force is served as feedback in closed-loop operating mode to improve the linear character of micromachining capacitive accelerometer. Its function in open-loop operating mode of capacitive accelerometer was analyzed in this paper. The derived equations which describe bias related sensitivity are in well agreement with experimental results. Based on this technology, an accelerometer originally used in range of ±1g was successfully used in range of ±0.01g with non linearity less than 0.2%.\;

关 键 词：微机械 加速度计 开环 工作模式 电容式 

分 类 号：TH824.4[机械工程—仪器科学与技术]