石英MEMS陀螺的结构特性分析  

Analysis of the Structure Characteristics of Quartz MEMS Gyroscope

作　　者：林日乐[1] 谢佳维[1] 周倩[1] 满欣[1] 李文蕴[1] 张巧云[1] 

机构地区：[1]中国电子科技集团公司第26所,重庆400060

出　　处：《压电与声光》2011年第4期544-546,553,共4页Piezoelectrics & Acoustooptics

摘　　要：介绍了石英微机电系统(MEMS)陀螺的工作原理及敏感芯片的音叉结构特点,采用有限元法分析了敏感芯片的结构特性,并对结构进行优化。利用石英晶体的压电效应,设计了合理的电极布局,并结合敏感芯片结构特点介绍了其微机械加工工艺。通过结构优化和合理的电极布局,提高了石英MEMS陀螺的性能。The principle and typical sensing elements structure of quartz MEMS gyroscope have been introduced in this paper. The structure characteristics of sensing elements have been analyzed, and the structure has been optimized by using the finite element method. The suitable electrode pattern has been designed by using the piezoelectric effect of quartz crystal. The quartz MEMS processing technology has been introduced based on the sensing elements structure. The performance of quartz MEMS gyroscope has been improved by optimizing the structure and designing the electrode pattern suitably. At last, the primary performance and application fields of quartz MEMS gyroscope have been introduced.

关 键 词：石英 微机电系统(MEMS) 陀螺 音叉 

分 类 号：TM229.1[一般工业技术—材料科学与工程]