新型摇摆质量微陀螺的设计与制作(英文)  

Design and Fabrication of a Novel Rocking-Mass Micromachined Gyroscope

作　　者：王雄[1] 肖定邦[1] 周泽龙[1] 陈志华[1] 吴学忠[1] 李圣怡[1] 

机构地区：[1]国防科学技术大学机电工程与自动化学院,长沙410073

出　　处：《纳米技术与精密工程》2011年第5期412-416,共5页Nanotechnology and Precision Engineering

基　　金：国家自然科学基金资助项目(51005239)

摘　　要：首先介绍了两种结构完全对称的高灵敏度的摇摆质量陀螺.设计并制作了一种对角驱动的新型摇摆质量微陀螺.利用硅的各向异性湿法腐蚀等MEMS体加工技术,简化了该微陀螺的制作工艺.该微结构的对称性、一致性和加工精度有很大改善,尤其是振动梁、激励部件和敏感部件等关键部件.详细阐述了该微陀螺的工作原理和结构设计,完成了微陀螺关键部件的制作和样机组装.利用NF公司的FRA 5087频率响应分析仪测试了样机大气下的振动模态,其中驱动频率为5.563 2 kHz,检测频率为5.553 4 kHz,频差为9.8 Hz,小于0.2%.利用频谱分析的方法测试了样机的哥氏力.测试结果表明这种摇摆质量微陀螺的设计与制作方法是可行的.Two kinds of rocking-mass gyroscopes, with high sensitivity, were presented in this paper. A novel rocking-mass micromachined gyroscope actuated diagonally was fabricated by using bulk silicon anisotropic wet etching and other MEMS micromachining technology. The main body of the microgyroscope is eligibly divided into four parts, so the fabrication procedure is simplified. The asymmetry, coherence and precision of microstructure, especially of vibratory beams, actuating parts and sensing parts, have been largely improved. The operational principle, structure design, fabrication, assembly and packaging were mentioned in details. The prototype of the rocking-mass micromachined gyroscope was fabricated and assembled. The mode characterizing system was built, and the atmospheric primary operational modes were also characterized. The center frequency of the driving mode is 5. 563 2 kHz, that of the sensing mode is 5. 553 4 kHz, and the split is 9.8 Hz, less than 0.2%. The Coriolis＇ force was also tested by spectrum analysis. The feasibility of the design and fabrication of rocking-mass microgyroscope was verified by those results.

关 键 词：摇摆质量陀螺 微陀螺 体微加工 各向异性湿法腐蚀 

分 类 号：V241.5[航空宇航科学与技术—飞行器设计]