ECR等离子体的磁电加热研究  

Magnetoelectric heating in the ECR plasma

作　　者：沈武林[1] 马志斌[1] 谭必松[1] 吴俊[1] 汪建华[1] 

机构地区：[1]武汉工程大学材料科学与工程学院,湖北省等离子体化学与新材料重点实验室,武汉430073

出　　处：《物理学报》2011年第10期478-482,共5页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:10875093)资助的课题~~

摘　　要：在ECR等离子体装置上进行了磁电加热研究,利用离子灵敏探针(ISP)测量了磁电加热前后离子温度的变化,研究了电极环偏压、磁场强度、气压等参数对磁电加热过程以及加热效率的影响.结果表明:等离子体的整体加热是通过离子在电极环鞘层中的磁电加热及被加热的离子沿径向的输运来完成的.轴心处离子温度随电极环偏压的升高呈非线性增加.磁电加热效率随偏压的增大而增大,在电极环偏压为1000V时,磁电加热效率为2%—2.5%,ECR等离子体中的离子温度能够提高20eV以上.磁场强度在磁电加热过程中对离子的限制和加热起到重要作用,当磁场强度在6.3×10-2—8.7×10-2T之间变化时,磁电加热的效率随磁场强度的增大而增大.气压在0.02—0.8Pa范围内,磁电加热的效率随气压的减小而增大.The magnetoelectric heating is investigated on an ECR plasma device.The ion temperatures are measured by ion sensitive probe（ISP） before and after magnetoelectric heating.The influences of bias voltage of electrical ring,magnet field and pressure on ion temperature and the efficiency of ion heating are studied.The results indicate that the whole heating of the plasma is accomplished through the magnetoelectric heating of the ions in the sheath of the electric ring and the radial transport of the heated ions.The ion temperature in the axial area increases with the bias voltage of electric ring,and their relationship is nonlinear.The ion temperature increases more than 20 eV when the bias voltage is 1000 V.A heating efficiency is achieved to be as high as 2%—2.5% and increases with the bias voltage increasing.The magnetic field strength plays an important role in the limitation and heating of the ions.The efficiency of the magnetoelectric heating increases with the increase of the magnetic field strength when the magnetic field strength changes from 6.3×10-2T to 8.7×10-2T.The efficiency of the magnetoelectric heating increases with the pressure decreasing when the pressure chenges in a range of 0.02—0.8Pa.

关 键 词：ECR等离子体 磁电加热 离子温度 

分 类 号：O532.2[理学—等离子体物理]