微机械气流式倾角传感器的研究  

Research on micromachined airflow tilt sensor

作　　者：朴林华[1] 崔雪梅[2] 余全刚[1] 王星[1] 梅传志[1] 张保丽[1] 

机构地区：[1]北京信息科技大学北京市传感器重点实验室,北京100101 [2]延边大学师范学院,吉林延吉133002

出　　处：《传感器与微系统》2011年第12期60-61,64,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(60772012);新世纪优秀人才支持计划资助项目(NCET);北京市重点实验室开放课题资助项目;北京市新世纪百千万人才工程培养计划资助项目;现代测控技术教育部重点实验室资助项目;北京市教委科技面上项目(KM201110772020)

摘　　要：提出了一种能敏感倾角的微机械气流式传感器。采用微机械工艺在硅板上腐蚀出一个深槽,在深槽上设置2个有金属薄膜热敏电阻器的悬臂梁,用半圆球外壳封装成一个密闭腔体形成敏感元件;通过惠斯登电桥提取倾角电压信号;利用单片机和温度传感器构成补偿电路,实现温度补偿和线性度补偿。测试结果表明:测量范围为±30°,分辨率为优于0.1°,响应时间优于50 ms,非线性度优于0.1%。该传感器不仅体积小,而且结构紧凑,工艺简单,敏感元件输出一致性好,适于批量生产。Micromachine airflow tilt sensor which can be sensitive to tilt angle is described. Adopting micro- machined technique two deep groove are corroded on the silicon plate, and two cantilever beams of metal film heated hot wire is set up at each deep groove. Semicircle airtight space forms sense elements. Through Wheatstone bridge ,the tilt output voltage is obtained. Single-chip computer and temperature sensor constitute compensation circuit to achieve temperature compensation and linear compensation. The test shows the sensor＇ s performance is as follow： measuring range is ＋30°, resolution is less than 0.1°, working temperature is better than 50 ms, nonlinear is less than 0.1%. The sensor is not only in small size but also in simply crafting. It is good in sensitive organ＇ s output consistency, and suitable for mass production.

关 键 词：微机械 倾角 气流 敏感元件 

分 类 号：TN379[电子电信—物理电子学]