用于MEMS变形镜的双电极压电厚膜致动器  

PZT-Thick-Film Actuators Driven by Double Electrodes for MEMS Deformable Mirror

作　　者：马剑强[1] 李保庆[1] 张晋弘[1] 许晓慧[2] 褚家如[1] 

机构地区：[1]中国科学技术大学精密机械与精密仪器系,合肥230027 [2]江苏省电力试验研究院有限公司,南京210036

出　　处：《纳米技术与精密工程》2012年第1期20-23,共4页Nanotechnology and Precision Engineering

基　　金：安徽省自然科学基金资助项目(090412027)

摘　　要：提出了一种用于MEMS变形镜的双电极驱动的压电陶瓷(PZT)厚膜致动器.采用有限元方法分析致动器变形时的应力分布情况,优化了内外圈电极尺寸,制作了61单元六边形分布的致动器阵列.测试结果表明,致动器在100 V工作电压下的冲程约为6.6μm,谐振频率为58 kHz,位移迟滞为8%～9%,通过采用单边电压-位移曲线的策略有效降低了位移迟滞,并进一步提出了分时驱动的电路方案.A piezoelectric ceramics（PZT） thick film actuator driven by double electrodes for MEMS de- formable mirror was investigated. The stress distribution in the PZT film was analyzed using finite element method and the parameters of the two electrodes were optimized. A 61-actuator array with a hexagonal segment structure was fabricated and characterized. The measurements showed that the actuator had a stroke of 6.6 μm at 100 V with the displacement hysteresis of 8%--9% and a resonant frequency of 58 kHz. The displacement hysteresis was greatly eliminated by using the strategy of staying on one side of the hysteresis loop. Furthermore, a driven circuit based time multiplex was designed.

关 键 词：变形镜 压电陶瓷(PZT) 致动器 双电极 

分 类 号：TN384[电子电信—物理电子学]