在蓝宝石、MgO衬底上ZnO波导膜的制备  

Fabrication of ZnO waveguide films on Al_2O_3 and MgO substrates

作　　者：王凤翔[1] 齐俊鹤[1] 卢菲[2] 刘秀红[3] 李爽[1] 陈志华[1] 宋红莲[1] 

机构地区：[1]山东建筑大学理学院,山东济南250101 [2]山东大学信息科学与工程学院,山东济南250100 [3]山东大学物理学院,山东济南250100

出　　处：《山东建筑大学学报》2011年第5期411-415,共5页Journal of Shandong Jianzhu University

基　　金：国家自然科学基金项目(51042002);山东省自然科学基金项目(2009ZRB019DZ)

摘　　要：以ZnO烧结陶瓷为靶材,应用射频磁控溅射技术在(001)蓝宝石、(100)MgO衬底上制备ZnO波导薄膜。利用棱镜耦合、X射线衍射、RBS背散射分析等技术研究了所沉积薄膜的光波导及内部结构信息。结果表明:在两种衬底上所沉积的ZnO薄膜可以形成优良的平面光波导结构;薄膜结晶状况为存在少量其他晶向的c轴择优取向;薄膜含有的Zn及O组分原子数比例为近化学计量比;薄膜的沉积速率受衬底材料表面能作用轻微影响;薄膜的有效折射率较ZnO体材料小且受衬底材料影响。生长在蓝宝石衬底上ZnO薄膜的平均晶粒尺寸较在MgO衬底上的小,且其随膜厚的增加无明显变化,但在MgO衬底上晶粒尺寸则随膜厚的增加有增大趋势。ZnO waveguide films are prepared on（001 ）Al2O3 and （100） MgO substrates by the magnetron sputtering technology and ZnO ceramic target. Optical waveguide properties and the internal structural information of the deposited thin films are investigated by the prism coupling method, X-ray diffraction（XRD） and Rutherford backscattering （RBS）technique. The results demonstrate that the ZnO films have well planar waveguide structure with c-axis preferred orientation growth which has little oth- er crystal direction and nearly stoichiometric of Zn rates are slightly influenced by the substrates. The and O composition ratio, and that the films＇ growth effective indices of the films are smaller than the bulk substrate material and affected by substrates. The average grain size of ZnO thin films deposited on sapphire substrates is smaller than that on MgO substrates, and it has no significant change as film thickness increases, yet on MgO substrates it has an increasing trend as the thickness increases.

关 键 词：磁控溅射 蓝宝石 MGO ZNO薄膜 波导膜 

分 类 号：O484.4[理学—固体物理]