微机械谐振器的快速测试方法  

Rapid Measurement Method for Micro-Machined Resonators

作　　者：邢维巍[1] 张晓灿[1] 樊尚春[1] 汤章阳[1] 

机构地区：[1]北京航空航天大学仪器科学与光电工程学院,北京100191

出　　处：《传感技术学报》2012年第2期198-201,共4页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(60927005;60804062)

摘　　要：为了缩短微机械谐振器的测量时间,提高测量效率。提出了一种针对压阻检测的微谐振器的频率特性测试新方法,该方法利用欧姆鉴相器,积分器和微处理器实现对微弱信号的有效检测。欧姆鉴相器以检测电阻为鉴相器,利用欧姆定律实现参考信号和被测信号的乘法鉴相运算;通过积分器实现对鉴相结果的积分运算,抑制干扰和噪声;微处理器用于对积分数据的采样并处理。实验结果表明:微谐振器快速测试方法样机的等效输入噪声指标约为槡2.7 nV/Hz,单频率点的测量时间为4 ms,与商用锁相放大器(LIA)相比,测量效率大大提高了。To reduce measurement time of micro-machined resonator and improve measurement efficiency, a novel frequency character measurement method for micro-machined resonator based on piezoresistive detection is put forward. An Ohm phase sensitive detector （Ohm-PSD）, an integrator and MCU are used to achieve the effective detection of weak signal. The phase detecting function of the ＇ Ohm-PSD＇ is achieved by the detective resistance with multiplying the reference signal and measured signal using Ohm＇s law. The integration of the multiplication results is carried out to restrain the interference and noise;MCU is used to process the sampling data in integration. Experimental results show that the equivalent input noise of rapid measurement method prototype is 2.7 nV√Hz, and measurement time at evel7 frequency point is 4 ms. Comparing it with the commercial Lock-in amplifier（LIA） , measurement efficiency increases greatly.

关 键 词：微机械谐振器 压阻检测 微弱信号检测 互相关检测 信噪比 快速测量 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置] TN911.6[自动化与计算机技术—控制科学与工程]