微机械全方位水平姿态传感器的研究  

The Research of Micromachined Airflow Omnibearing Level Posture Sensor

作　　者：朴林华[1] 崔雪梅[2] 王星[1] 余全刚[1] 梅传志[1] 张保丽[1] 

机构地区：[1]北京信息科技大学北京市传感器重点实验室,北京100101 [2]延边大学师范学院,吉林延吉133002

出　　处：《压电与声光》2012年第2期207-209,213,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(60772012);新世纪优秀人才支持计划基金(NCET)资助项目;北京市重点实验室开放课题基金资助项目;北京市新世纪百千万人才工程培养基金资助项目;现代测控技术教育部重点实验室基金资助项目;北京市教委科技面上基金资助项目(KM201110772020)

摘　　要：提出了一种能敏感全方位水平姿态的微机械传感器。采用微机械工艺制作的正八边形敏感元件敏感全方位水平姿态;通过前置信号电路和数字电路构成信号处理电路,实现倾角电压信号的提取,全方位信号合成和全方位倾角信号的灵敏度补偿。测试结果表明,分辨率优于0.1°,方位角测量范围可达360°,倾斜角度测量范围可达到20°。该传感器不仅体积小,且结构紧凑,工艺简单,敏感元件输出一致性好,适于批量生产。A micromachined omnibearing level posture sensor has been proposed in this paper.The octagonal sensing organ fabricated by the micromachined technique is used to sense the omnibearing level posture;the signal processing circuit is composed of a pre-signal circuit and a digital circuit to pick up the voltage signal and synthesize the omnibearing signal as well as compensate the resolution of the omnibearing tile signal.It is testified that the resolution is less than 0.1°,the scope of azimuth is 360°,and the scope of tile angle is 20°.The sensor is not only small in size but also is compact and simple in fabrication.It is good in sensitive organ＇s output consistency,and suitable for mass production.

关 键 词：微机械 全方位 水平姿态 敏感元件 

分 类 号：TN379[电子电信—物理电子学] TN37