基于MEMS静电微镜驱动器的光纤相位调制器  

Fiber-optic phase modulator based on MEMS electrostatic micro-mirror actuators

作　　者：翟雷应[1,2] 徐静[1] 吴亚明[1] 刘闯 雷洪波 陶大勇 

机构地区：[1]中国科学院上海微系统与信息技术研究所微系统技术重点实验室,传感技术联合国家重点实验室,上海200050 [2]中国科学院研究生院,北京100039 [3]中石油吉林石化分公司化肥厂,吉林132021 [4]中石油吉林石化分公司炼油厂,吉林132022

出　　处：《光电子．激光》2012年第9期1635-1643,共9页Journal of Optoelectronics·Laser

基　　金：国家高技术研究发展“863”计划(2008AA03Z406,2009AA03Z443);国家自然科学基金(60877066)资助项目

摘　　要：设计并制作出了一种基于MEMS静电微镜驱动器的光纤相位调制器。MEMS静电驱动器采用垂直梳齿驱动技术,驱动硅微反射镜沿其法线方向的垂直平移运动以实现入射光波的光相位调制。MEMS静电微镜驱动器与光纤准直器耦合构成MEMS光纤相位调制器,避免了拉伸光纤或改变折射率的困难,具有MEMS技术批量制造、低成本等优势。采用MEMS工艺成功制作出MEMS光纤相位调制器,并实现Michelson光纤干涉仪。利用ASE宽带光源对光纤相位调制器的静态调制特性进行测试,采用Michelson光纤干涉仪对光纤相位调制器的动态调制特性进行测试,结果表明,MEMS光纤相位调制器50V偏压实现了1 550nm光波的2π相位调制,当器件谐振频率为7.15kHz以及交、直流电压幅值分别为12.5V时,响应幅值可达6.8μm,可以实现多个2π的相位的正弦调制。A fiber-optic phase modulator （FOPM） is designed and fabricated in this paper, which is based on the electrostatic-driven micromirror by MEMS technology. The electrostatic actuator using the vertical comb driver is designed to drive the Si-micromirror in out-of-plane piston motion to modulate the incident light. The MEMS micromirror is coulpled with the fiber collimator to implement the FOPM. The scheme avoids the stretching or changing refractive index of the fiber and takes advantages of batch fabrication and low cost. The MEMS-FOPM is （achieved successfully by MEMS process and the fiber-optic Michelson interferometer is realized using the fabricated FOPM. Its static characteristics are measured by the fiber-optic Michelson interferometer with ASE source. Its dynamic response was measured by a Michelson interferometer. The results show the FOPM can realize 2π phase modulation with 1 550 nm wavelength at 50 V de driving voltage. Its dynamic displacement at its mechanical resonant frequency of 7.15 kHz is 6.8μm under 12.5 V ac driving voltage with 12.5 V dc bias voltage,so it can realize multiple 2π sinusoidal phase modulations.

关 键 词：光纤相位调制器 MEMS 垂直梳齿 微镜 光纤传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]