用于微机械器件的Fe-Ni合金电镀沉积膜的性能  

CHARACTERISTICS OF Fe-Ni ALLOY DEPOSITS FOR MEMS APPLICATIONS

作　　者：陈垚[1] 张轩雄[1] 熊幸果[1] 王渭源[1] 

机构地区：[1]中国科学院上海冶金研究所,上海200050

出　　处：《金属学报》2000年第5期525-529,共5页Acta Metallurgica Sinica

摘　　要：结合Ｓｉ体微机械技术和电镀技术加工出Ｆｅ－Ｎｉ／Ｃｕ／Ｓｉ复合悬臂梁，其中Ｆｅ－Ｎｉ膜厚３μｍ，Ｃｕ膜厚０．２μｍ．利用共振法首次测出在１．３Ｐａ气压下，复合悬臂梁中Ｆｅ－Ｎｉ（Ｆｅ６４，Ｎｉ３６；质量分数，％，下同）电镀沉积膜的内耗为１０－３．利用自行设计的微力／微位移天平法，测出Ｆｅ－Ｎｉ（Ｆｅ ５７， Ｎｉ ４３）／Ｃｕ／Ｓｉ复合悬臂梁的Ｙｏｕｎｇ’ｓ模量为１．０×１０１１Ｎ／ｍ２．Ｆｅ－Ｎｉ电镀沉积膜的内应力随膜中Ｆｅ含量的增加先是增大然后减小．在Ｉｎｖａｒ合金（Ｆｅ６４，Ｎｉ３６）成分附近达到最大约 ３００ ＭＰａ．Ｆｅ－Ｎｉ电镀膜的热膨胀系数与膜中Ｆｅ含量关系则与内应力相反，但与合金体材料变化趋势一致，在Ｉｎｖａｒ合金成分附近达到最小，其值高于相应成分的合金体材料，约６×１０－６／℃。The Fe-Ni/Cu/Si composite cantilevers were made with the combination of bulk- silicon micromaching technology and electrodeposition technology. Using the composite cantilever, the internal friction and Young's modulus of Fe-Ni deposit were measured. The internal friction of Fe-Ni deposit (Fe 64, Ni 36, mass fraction,%) is about 10-3 under resonant frequency 247 Hz and vaccum 1.3 Pa. Based on home-made load-deflection balance method, the Young's modulus of composite cantilever (Fe 57, Ni 43,mass fraction,%) was measured to be 1.0×1011N/m2. Average internal stress of Fe-Ni deposits increases with Fe content up to a maximum of about 300 MPa at 64% Fe, then decreases with Fe content. On the contrary,thermal expansion coefficients (TECs) of Fe-Ni deposits decrease with Fe content down to a minimum of about 6×10－６/℃ near the composition of Invar alloy. TECs of Fe-Ni deposits change with the same trend as those of bulk Fe-Ni alloys, although TECs of Fe-Ni deposits were higher than those of bulk Fe-Ni alloys near the Invar composition.

关 键 词：微机械 Fe-Ni合金电镀沉积膜 内应力 热膨胀系数 

分 类 号：TH－39[机械工程] TQ153.2[化学工程—电化学工业]