MEMS热敏元件工艺仿真技术的研究  

Study on a craft simulation technology for the MEMS thermal element

作　　者：梅传志[1] 朴林华[1] 张保丽[1] 

机构地区：[1]北京信息科技大学传感技术研究中心,北京100192

出　　处：《北京信息科技大学学报（自然科学版）》2012年第4期93-96,共4页Journal of Beijing Information Science and Technology University

基　　金：国家自然科学基金资助项目(60772012);新世纪优秀人才支持计划(NCET)资助项目;北京市重点实验室开放课题资助项目;北京市新世纪百千万人才工程培养资助项目;现代测控技术教育部重点实验室资助;北京市教委科技面上项目(KM201110772020);北京市自然科学基金项目(4122030)

摘　　要：在微射流陀螺工艺制造和设计的基础上,针对MEMS热敏元件的工艺信息,对其进行MEMS工艺仿真技术的研究。建立了MEMS热敏元件工艺结构的基本模型,基于这一模型,利用L-Edit编辑器绘制了完整版图结构;研究了工艺流程的模拟实现方法,利用基于TCl/TK语言开发的工艺编辑器绘制编辑出工艺流程文件;在三维平台上将版图根据工艺流程重构,可用于检测工艺方案的合理性。On the basis of the craft manufacture and design of micro fluidic gyroscope, according to processing information of thermal element, study of the MEMS process simulation technology about the thermal components is made. A basic model of the craft structure about the MEMS thermal components is established. Based on this model, a complete mask layout structure is created by using the L-Edit editor. Then a simulation method of craft process is studied. The craft process documents is edited by the use of the technological editor develop based on the TC1/TK based on the craft process in a 3D platform. Which can be program technology. language. Finally the layout is reconstructed used to detect the rationality of the process

关 键 词：MEMS工艺 热敏元件 版图文件 工艺文件 

分 类 号：TN379[电子电信—物理电子学] TN37