金刚石SAW滤波器的设计和制作  

Design and Fabrication of Diamond SAW Filters

作　　者：陈颖慧[1,2] 高杨[1] 郑英彬[1] 赵兴海[1] 

机构地区：[1]中国工程物理研究院电子工程研究所,绵阳621900 [2]中国工程物理研究院北京研究生部,北京100088

出　　处：《微纳电子技术》2012年第10期662-666,692,共6页Micronanoelectronic Technology

基　　金：中国工程物理研究院科技发展基金重点课题(2008A0403016;2010A0302013)

摘　　要：通信系统向高频的发展趋势使声表面波(SAW)滤波器技术面临着越来越多的挑战。利用传统材料制作SAW滤波器的中心频率很难达到GHz频段,因此探索在高声速材料基础上制作SAW滤波器成为一种必然趋势。基于高声速材料金刚石设计了IDT/ZnO/金刚石结构的薄膜SAW滤波器,设计了镜像阻抗连接IDT的结构参数,并采用ADS软件对该结构进行了建模仿真。然后,通过ZnO薄膜制备工艺和IDT电极制备工艺,获得了金刚石SAW滤波器样品。最后,采用RF探针台对所制得的样品进行了性能测试和数据分析。测试结果表明,在金刚石厚膜衬底上获得了频率超过1 GHz的SAW滤波器样品。The fast developments toward high frequency of the communication systems advance more and more challenges for the technology of high frequency surface acoustic wavec （SAW） filters. Generally, the frequency of SAW filters fabricated by the traditional material is not easy to reach GHz level, thus exploring high sound velocity materials to fabricate SAW filters becomes an inexorable trend. Based on the diamond material with high sound velocity, the film SAW fil- ters of interdigital transducer （IDT）/ZnO/ diamond were designed. Besides that, the sturcture parameters of the image impedance connection IDT were designed, and the structure was simula ted by adopting the ADS software. By the ZnO film fabrication technology and IDT fabrication technology, the diamond SAW filters samples were obtained. Finally, the SAW filters samples were measured using the RF probe, and the test data were analysed. The test results show that the frequency of SAW filters sample using IDT/ZnO/diamond structure is more than 1 GHz.

关 键 词：射频微机电(RF MEMS) SAW滤波器 金刚石 ZNO薄膜 叉指换能器(IDT) 

分 类 号：TH703[机械工程—仪器科学与技术] TN713[机械工程—精密仪器及机械]