射频电感耦合夹层等离子体中的模式转换  

Mode transition of inductively coupled plasma in interlayer chamber

作　　者：杜寅昌[1] 曹金祥[1] 汪建[1] 郑哲[1] 刘宇[1] 孟刚[2] 任爱民[2] 张生俊[2] 

机构地区：[1]中科院基础等离子体物理重点实验室,中国科学技术大学近代物理系,合肥230026 [2]试验物理与计算数学实验室,北京100076

出　　处：《物理学报》2012年第19期337-342,共6页Acta Physica Sinica

摘　　要：本文利用微波相位法和光谱诊断法,研究了ICP放电等离子体在圆台状夹层等离子体中E模和H模相互转换的物理现象.E模和H模的之间转换过程是一个瞬间突变的,转换点的输入功率随真空室压强的变化而变化.H模向E模转换的阈值功率低于E模向H模转换的值,等离子体参数随输入功率变化曲线类似于铁磁物质中的磁滞回线.ArⅡ408.2 nm谱线的强度的变化规律和电子密度随功率变化的规律基本一致.通过本实验可以获得一种电子密度范围为3.85×10^(11)cm^(-3)<n_e<4.68×10^(11)cm^(-3),外表面积为0.3 m^2,厚度为2 cm稳定工作的等离子体源.We do some research on E-H mode transition of inductively coupled plasma （ICP） in the interlayer chamber, using the microwave phase and plasma spectrum diagnotic technique. The mode transition between E and H mode is a sudden changes phenomenon. The input power of the transition varies as the pressure changes in the chamber. The transition power from H to E is less than from E to H, so the hysteresis in power hence is established. The change of the relative spectral intensity is basically the same the variation of the electron density with input power. We obtain a stable plasma source, with an electron density ranging from 3.85× 1011 cm-3 to 4.68×1011 cm-3, an outer surface area of 0.3 m2, and a thickness of 2 cm.

关 键 词：ICP放电 E—H模 等离子体源 等离子体光谱 

分 类 号：O53[理学—等离子体物理]