基于MEMS微镜的可调光学衰减器  

Variable optical attenuator based on MEMS micromirror

作　　者：刘英明[1,2] 徐静[1] 钟少龙[1] 翟雷应[1] 吴亚明[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所微系统技术重点实验室传感技术联合国家重点实验室,上海200050 [2]中国科学院研究生院,北京100039

出　　处：《光电子．激光》2012年第12期2287-2291,共5页Journal of Optoelectronics·Laser

摘　　要：设计并制作了一种基于微光机电系统(MEMS)微镜的可调光衰减器(VOA)。其中微镜的谐振频率为11.26kHz,采用垂直梳齿驱动器驱动。微镜采用体硅微加工工艺在绝缘体上硅(SOI)片上制作。采用制作的微镜和双光纤准直器装配成VOA,衰减器在扭转角度为0.3°时驱动电压只有4.4V,开启和关断时的响应时间分别为1.67ms和2.74ms,插入损耗为0.6dB,最大衰减值为40dB。This paper presents the design, simulation, fabrication and successful demonstration of a variable optical attenuator （VOA） based on micromachined micromirror. The micromirror has a rotational resonance of 11.26 kHz,and is actuated by vertical comb driver which is fabricated by bulk micromaching process on a silicon on insulator （SOD wafer. The VOA is composed of the micromirror and double fiber collimators. The VOA operates at a low driving voltage of 4.4 V corresponding to the rotation an- gle of 0. 3°. The turn-on and turn-off response time of the VOA is 1.6 ms and 2. 74 ms,respectively. The insertion loss is 0.6 dB. The optical attenuation is measured and an optical attenuation as large as 40 dB is obtained.

关 键 词：可调光衰减器(VOA) 微光机电系统(MEMS) 微镜 垂直梳齿驱动器 

分 类 号：TN256[电子电信—物理电子学]