压电旋转驱动器制作及性能测试  

Machining and functional testing of piezoelectric rotary actuator

作　　者：温建明[1] 马继杰[1] 曾平[1] 张忠华[1] 阚君武[1] 程光明[1] 

机构地区：[1]浙江师范大学精密机械研究所,浙江金华321004

出　　处：《光学精密工程》2013年第1期131-136,共6页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.51175478;51205369);浙江省公益性技术应用研究计划资助项目(No.2011C23040);浙江省自然科学基金资助项目(No.Y1110529;Y4110315)

摘　　要：提出了通过控制正压力来改变摩擦力的方案,进而研制了一种以压电叠堆为动力转换元件的新型压电旋转驱动器。采用两个驱动用压电叠堆对称布置的方式设计了该旋转驱动器结构,探讨了旋转驱动器运动机理,制作了压电旋转驱动器试验样机并对其进行了试验测试。试验结果表明,该驱动器输出步长线性度较好,当驱动电压为10V、频率为2Hz时,驱动器旋转步长为20μrad。分析了驱动器输出稳定性,针对存在的问题提出通过施加控制系统来有效提高不同起始位置驱动器的运动稳定性。对试验结果进行误差分析,找出了产生误差的原因,为驱动器的进一步优化设计提供了参考。研究证明了该压电旋转驱动器设计方法的可行性,利用该方法可以制作出结构简单,体积小,适合在微驱动领域中应用的驱动器。： A new piezoelectric inertial rotary actuator by taking piezoelectric stacks as the power con- verters was proposed based on controlling the normal pressure to regulate the frictional force. By ar- ranging two piezoelectric stacks symmetrically, the structure of the piezoelectric rotary actuator was designed, and its motion mechanism was explored. A prototype of piezoelectric rotary actuator was developed and the experimental test on the actuator was performed. Experimental results show that the actuator is excellent in linearity of output step and its rotation step is 20 μrad when the square wave is 10 V and the frequency is 2 Hz. The stability of the actuator was analyzed and an extra control system was added to overcome the shortcoming in the step stability at different start points. The error sources were obtained by analysis on the test data, which provides references for further optimization of the actuator. Research in this paper proves the feasibility of the design method for piezoelectric ro- tary actuators. It can be used in design of piezoelectric rotary actuators with simple structures, small volumes for micro-driving applications.

关 键 词：压电驱动器 旋转驱动器 压电叠堆 惯性驱动 

分 类 号：TM384[电气工程—电机] TH703.8[机械工程—仪器科学与技术]