反差增强材料最大吸收波长的经验估算  

An Experimental Computation for Maximum Absorption Wavelength of Contrast Enhancement Materials

作　　者：韩安云[1] 田振文[1] 

机构地区：[1]机电部第13研究所,石家庄050051

出　　处：《半导体情报》1991年第5期12-21,共10页Semiconductor Information

基　　金：国家自然科学基金

摘　　要：本文分析了二芳基硝酮、二芳基乙烯、二芳基偶氮化合物以及芳族重氮化合物的最大吸收波长(λmax)与环上取代基的Hammett σ系数之间的关系。发现λmax的红移量与Σ|σ|之间有强相关性。并提出一种经验估算法,用于判断某些反差增强材料的λmax。列出了若干估算实例,说明本方法有一定准确性和实用意义。The relationship between the maximum absorption wavelength (λ_(max)) of diaryl-nitroncs, diaryl-ethylenes, diaryl- azoes, aryl-diazoes, and Hammett σ coefficient of the substituents is analysed in this paper. It has been found that there is a close correlation between the red shift value of the λ_(max) and ∑|σ| of the substituents. According to this fact, the experimental computa- tion for estimating λ_(max) of contrast enhanceme, materials is proposed. Some results are also given. This method has been proved to have adequate accuracy and utility.

关 键 词：刻蚀 反差增强材料 抗蚀剂 吸收波 

分 类 号：TN305.7[电子电信—物理电子学]