一种新型三维多方向敏感的非硅微机械惯性开关  

Novel multidirectional-sensitive MEMS inertial switch manufactured based on non-silicon surface micromachining technology

作　　者：朱斌[1] 杨卓青[1] 陈文国[1] 丁桂甫[1] 赵小林[1] 

机构地区：[1]上海交通大学微米/纳米加工技术重点实验室,上海200240

出　　处：《振动与冲击》2013年第5期104-107,118,共5页Journal of Vibration and Shock

基　　金：十二五预先研究项目(51308050304);教育部重点支撑计划项目(625010105)

摘　　要：基于非硅表面微加工技术,设计并制造一种新型三维多方向敏感的微惯性开关。选用弹簧-质量块-阻尼的典型碰撞结构,主要由可动电极悬臂梁弹簧—质量块系统、水平固定电极、垂直复合柔性固定电极三部分组成。利用ANSYS有限元软件对器件进行模态和动力学碰撞仿真分析,并对该微机械惯性开关进行落锤冲击试验,结果表明,在水平和竖直方向的阈值均为50～60g,接触时间可稳定在40μs以上。Based on non-silicon surface micromachining technology, a novel three-dimension micro inertial switch with muhidireetional-sensitive property has been designed and fabricated. Using typical mass-spring-damper model, the switch mainly consists of mobile electrode （mass） with beam spring, flexible fixed planar electrode and vertical electrodes. By finite element simulation, modal analysis of the device was made to determine the natural frequency of the device ; and dynamic collision simulation of the device was made to verify the working principle. Micro-switches fabricated were tested by using drop weight method. The results show that the threshold acceleration distributes between 50g and 60g, which basically fulfills the requirement of being close to the expected value of 60g; and the response time to lms half-sine shock is above 40 s.

关 键 词：惯性开关 微机电系统 多向敏感 

分 类 号：TH703[机械工程—仪器科学与技术]