熔融石英棱镜在准分子激光光谱控制系统中的应用研究  

Application Study on Fused Silica Prisms in Excimer Laser Spectrum Control

作　　者：单耀莹[1,2] 赵江山[1] 李慧[1] 王倩[1] 沙鹏飞[1] 周翊[1] 周军[3] 袁志军[3] 张海波[3] 楼祺洪[3] 

机构地区：[1]中国科学院光电研究院,北京100094 [2]中国科学院大学,北京100049 [3]中国科学院上海光学精密机械研究所,上海201800

出　　处：《中国激光》2013年第4期43-47,共5页Chinese Journal of Lasers

基　　金：国家重大科技专项(2009ZX02306-02)资助课题

摘　　要：针对准分子激光器的相关应用,对准分子激光进行光谱控制是非常必要的。相关光谱控制主要包括激光线宽窄化及激光中心波长的稳定输出,常用的线宽压窄方式是利用扩束棱镜组结合光栅构成线宽压窄模块达到激光线宽窄化的效果。利用熔融石英(FS)等腰直角棱镜与光栅的组合实现了线宽0.957pm的ArF准分子激光输出。理论分析和实验结果表明,作为深紫外波段的良好通光材料,熔融石英棱镜可以实现与常用氟化钙(CaF2)棱镜相近的线宽压窄结果。同时作为等腰直角方式设计,具有更高的切割成型工艺精度、更低的使用维护成本和更广泛的应用价值。Due to the application of excimer lasers, it is necessary to control the output spectrum of exCimer laser. Control spectrum contain narrowing bandwidth and stable output of center wavelength. The familiar mean of line- narrowing is using combination of beam expander prisms and grating to narrow the bandwidth of laser. With the combination of fused silica prisms and grating controlling the ArF excimer laser, the line-narrowed excimer laser of the output spectrum of light source is 0. 957 pm. Theory analysis and experiments indicate that with a high transmission in ultraviolet （UV）, fused silica prisms can reach the same effect in line-narrowing with the CaF2 which is often used now. At the same time, the cutting way of isoceles triangle prisms can be made more exactly, less costing and should be applied more widely.

关 键 词：激光器 准分子激光器 线宽压窄 棱镜 熔融石英 CAF2 

分 类 号：TN242[电子电信—物理电子学] TN248.2