光学级CVD金刚石膜的研究进展与应用  

RESEARCH PROGRESS AND APPLICATION OF OPTICAL GRADE CVD DIAMOND FILMS

作　　者：涂昕[1] 满卫东[1] 吕继磊[1] 朱金凤[1] 

机构地区：[1]武汉工程大学湖北省等离子体化学与新材料重点实验室,武汉430073

出　　处：《真空与低温》2013年第2期63-70,共8页Vacuum and Cryogenics

摘　　要：金刚石膜优异的光学性能使其成为光学窗口材料的最佳选择。天然金刚石数量稀少,价格昂贵,且为颗粒状,限制了其在光学领域的应用。化学气相沉积(CVD)金刚石膜技术的出现使得其在光学窗口材料上的应用得以实现。首先介绍了光学级CVD金刚石厚膜和薄膜的制备,随后指出了国内外光学级CVD金刚石膜的研究进展,最后进行了光学级CVD金刚石膜的前景展望。Diamond films, excellent optical property make it become the best choice of optical window materials. The limited numbers, high cost and granular shape of natural diamond limit its application in optical filed. The appearance of chemical vapor deposition （CVD} technology makes it reality that diamond films could be used in this aspect. In this paper,The prep- aration of optical grade CVD diamond thick films and thin films was firstly introduced, then the research progress of them both at home and abroad was pointed out,finally,the prospect of optical grade CVD diamond films was proposed.

关 键 词：金刚石膜 化学气相沉积 光学级 研究进展 

分 类 号：TK513.2[动力工程及工程热物理—热能工程]