基于ARM的高分辨率压电陶瓷驱动电源  

High-resolution piezoelectric ceramic actuator power supply based on ARM

作　　者：葛川[1] 李朋志[1] 章明朝[1] 闫丰[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033

出　　处：《现代电子技术》2013年第14期166-170,共5页Modern Electronics Technique

基　　金：国家重大科技专项02专题资助(2009ZX02205)

摘　　要：根据压电陶瓷微位移器对驱动电源的需求,设计了压电驱动电源系统。详细介绍了电源系统中的数字电路部分和模拟电路部分,并对驱动电源的精度与稳定性进行了分析与改进。最后对驱动电源的性能进行了实验验证,实验结果表明:所设计的电源输出电压噪声低于0.43 mV、输出最大非线性误差低于0.024%、分辨率可达1.44 mV,能够满足高分辨率微位移定位系统中静态定位控制的需求。According to the requirement of the micro piezoelectric actuator for driving power supply, a piezoelectric actua- tor power supply system was designed. In this paper, the digital circuit and analog circuit in the power supply system were de- scribed in detail. The accuracy and the stability of the actuator power supply were analyzed and improved. Finally, the perfor-mance of the power supply was verified in experiment. The experimental results indicate that the output voltage noise of the de- signed power supply is lower than 0.43 mV, the maximum nonlinear output error is less than 0.024%, and the resolution can reach 1.44 mV, which can meet the requirement of static positioning control in the high resolution micro-displacement system.

关 键 词：ARM 压电陶瓷 驱动电源 PI控制器 

分 类 号：TN911-34[电子电信—通信与信息系统] TP368.1[电子电信—信息与通信工程]