多自由度短行程超精密平面电机技术发展综述  

Development of Multi-DOF Micro-Motion Ultra-Precision Planar Motors

作　　者：寇宝泉[1] 张赫[1] 

机构地区：[1]哈尔滨工业大学电气工程及自动化学院,哈尔滨150001

出　　处：《电工技术学报》2013年第7期1-11,共11页Transactions of China Electrotechnical Society

基　　金：国家科技重大专项(2009ZX02207-001);教育部新世纪优秀人才支持计划(NCET-08-0158)资助项目

摘　　要：多自由度短行程超精密平面电机具有高精度、高速度、高频响等优点,在半导体光刻加工、超精密测量、生物芯片技术等现代精密、超精密加工装备领域具有广阔的应用前景,近年来受到学术界的广泛关注。本文介绍了多自由度短行程超精密平面电机的研究现状,对近年来国内外用于实现超精密定位的主流结构进行了综述,总结了目前超精密平面电机的主要研究内容与关键技术,并讨论了其未来的发展趋势。Multi-DOF micro-motion ultra-precision planar motors have many advantages such as high precision, high speed, high frequency response and so on. It has broad application prospects in modern precision, ultra-precision machining equipment domains such as semiconductor photolithography processing, ultra precise measurement, biological chip technology. In recent years, multi-DOF micro-motion ultra-precision planar motors have attracted widespread attention in academic field. In this paper, the current research status of multi-DOF micro-motion ultra-precision planar motors is introduced. The dominating structures of ultra-precision planar motors for ultra-precision positioning are presented. The main research contents and key technologies of ultra-precision planar motors are summarized. The development trend of ultra-precision planar motors is discussed.

关 键 词：平面电机 超精密定位 多自由度 短行程 重力补偿器 

分 类 号：TM35[电气工程—电机]