一种LED辐照激励下的室温NO_2气体传感器研究  

Study of a room temperature NO_2 gas sensor under LED radiation

作　　者：贾丁立[1] 胡明[1] 李明达[1] 刘青林[1] 

机构地区：[1]天津大学电子信息工程学院,天津300072

出　　处：《传感器与微系统》2013年第8期29-31,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(62171070;60771019;60801018);天津市应用基础及其前沿技术研究计划资助项目(11JCZDJC15300)

摘　　要：采用快速热处理的方法,提高了室温下WO3薄膜气体传感器对NO2的敏感特性。首先采用直流对靶磁控溅射的方法在Al2O3陶瓷基底上沉积纳米WO3薄膜,然后在N2∶O2=4∶1的混合气氛中,分别在500,600℃和700℃的热处理温度下对纳米WO3薄膜进行快速热处理。所得样品表面形貌用扫描电子显微镜(SEM)进行观察,晶体结构用X射线衍射仪(XRD)进行表征,在室温下检测经过不同热处理温度的样品在LED光照下的WO3薄膜气体传感器的NO2敏感性能。结果表明:经过600℃快速热处理的样品的气敏性能最好,其具有较大的比表面积,灵敏度最高,在室温下可以达到100,且具有较好的响应恢复特性,测试环境的辅助激励光源LED易与IC集成,具有降低能耗、简便实用的特点。To improve sensing properties of WO3 thin film gas sensor on NO2 at room temperature,the WO3 thin films are sputtered on Al2O3 by DC facing target magnetron sputtering,the samples is rapidly thermal treated in the mixture gas of N2∶ O2=4∶ 1,and at different temperature of 500,600 ℃and 700 ℃.The morphology of all the three samples are investigated by scanning electron microscope（SEM）,the crystallization structure is characterized by X-ray diffraction（XRD）.The NO2 sensing measurement experiments are taken under the LED light at the room temperature.The result shows that the sample after rapidly thermal treated at 600 ℃ performs best,with the sensitivity of about 100 and has good response and recovery property.LED is easy to integrate with IC,and has low energy consumption,simple,and practical.

关 键 词：室温气体传感器 金属氧化物半导体 快速热处理 发光二极管 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]