不同电压下静电驱动膜片弹性变形分析  

Elastic Deformation Analysis of Electrostatic Driving Structure in Different Voltage

作　　者：辛超[1] 李丽伟[1] 

机构地区：[1]上海电力学院能源与机械工程学院,上海200090

出　　处：《上海电力学院学报》2013年第4期330-332,共3页Journal of Shanghai University of Electric Power

摘　　要：基于静电场和弹性薄板理论,建立了周边固支边界条件下静电驱动圆膜弯曲的理论模型,同时对比两种情况得出了在不同驱动电压下的位移分析.通过计算实例获得了其结构的振动振型、谐振频率及极限加载电压,利用Ansys软件针对静电驱动结构的振动进行了模态分析,得到了其振动模态振型和固有频率.Based on the electrostatic field and the theory of elastic thin plate, electrostat^cally actuated circular membrane theoretical model is built, which is established in the clamped boundary conditions. At the same time, the two kinds of situation are compared to obtain the displacement analysis in different voltage. Through the calculation example the structure vibration type, resonant frequency and limit load voltage are obtained. Using Ansys software for electrostatic drive structure vibration modal analysis, the vibration modal shapes and its frequency are obtained.

关 键 词：微机电系统 静电驱动 膜片 弹性变形 薄板理论 

分 类 号：TH703.1[机械工程—仪器科学与技术] TM38[机械工程—精密仪器及机械]