沉积温度对硫化锌(ZnS)薄膜的结晶和光学特性影响研究  

Investigation of the crystal and optical properties of ZnS thin films deposited at different temperature

作　　者：于天燕[1] 秦杨[1] 刘定权[1] 

机构地区：[1]中国科学院上海技术物理研究所,光学薄膜与材料研究室,上海200083

出　　处：《物理学报》2013年第21期206-210,共5页Acta Physica Sinica

摘　　要：对不同温度下沉积的ZnS薄膜的结晶情况和光学特性进行了研究,结果表明:沉积温度对ZnS薄膜的物理和光学特性有较大影响,不同的温度沉积的ZnS薄膜具有不同的择优取向,牢固度也大不相同;不同沉积温度下,ZnS薄膜的光学常数也不尽相同.温度为115℃和155℃时,ZnS薄膜的物理性能和光学性能较差,不适合空间用光学薄膜的研制使用.而190℃和230℃沉积温度下所得薄膜具有较好的物理和光学性能,适合于不同要求的空间用薄膜器件的研制使用.The crystal and optical properties of ZnS optical coatings deposited at different substrate temperatures are studied in this paper. It is indicated that the substrate temperature has an evident effect on the properties of ZnS films. The XRD varies with the temperature. With the increase of the temperature, the XRD of ZnS film exhibits an obvious （111） orientation. At the same time, ZnS films have different stabilities at different substrate temperatures. At 115 ~C and 155 ~C, the stability gets worse but at 190 ~C and 230 ~C, it gets better. The variation of the substrate temperature has also effect on the optical properties of ZnS film, such as optical constants and deposition coefficient. At higher temperatures （190 ℃ and 230 ℃）, the refractive index is higher than at lower temperatures （115 ℃ and 155 ℃）. But the deposition coefficient gets smaller. Optical constants of ZnS films are calculated at different temperature.

关 键 词：硫化锌薄膜 沉积温度 表面形貌 光学常数 

分 类 号：O484[理学—固体物理]