MPCVD法合成大单晶金刚石的研究进展  

Research Progress on Synthesis of Large-scale Single Crystal Diamond by MPCVD

作　　者：林晓棋 满卫东[1] 张玮[1,2] 吕继磊[2] 江南[2] 

机构地区：[1]武汉工程大学湖北省等离子体化学与新材料重点实验室,湖北武汉430073 [2]中国科学院宁波材料技术与工程研究所,浙江宁波315201

出　　处：《硬质合金》2013年第5期288-296,共9页Cemented Carbides

摘　　要：单晶金刚石具有诸多多晶金刚石所无法替代的优良性能,是新世纪高端技术领域发展所需的重要材料。随着技术的不断改进,MPCVD法合成单晶金刚石的生长速率、质量和尺寸都有了很大的提高。目前,应用最新的MPCVD技术合成的单晶金刚石,其最高生长速率达到200μm/h,合成尺寸达到英寸级,为单晶金刚石在超精密加工、光学元器件、半导体、探测器等高技术领域的应用提供了有力的支撑。本文主要综述了进入二十一世纪以来,MPCVD单晶金刚石的研究进展,并对其应用作简单的介绍。Owing to many excellent properties that cannot be replaced by polycrystalline diamond, single crystal diamond is one of the most important materials in the high-tech fields in the 21st century. With the continuous improvement of synthetic technology, great progresses have been achieved on growth rate, quality and size of single crystal diamond synthesized by MPCVD. At present, using the latest MPCVD technology to synthesis single crystal diamond, researchers can get a grow rate of 200 μm/h and a size of 1 inch, which support the applications of single crystal diamond on high-tech fields such as ultra-precision machining, optical components, semiconductors, detectors, etc. In this paper the progress of single crystal diamond synthesized by MPCVD in the new century is reviewed and its applications are briefly introduced.

关 键 词：MPCVD 金刚石 单晶 LIFT-OFF 马赛克 

分 类 号：TQ164[化学工程—高温制品工业]